OPAC_KOHA catalog › Results of search for 'su:"Microlithography"'

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	1.	Handbook of VLSI Microlithography: Principles, Tools, Technology and Applications by John N. Helbert by Helbert, John N. Material type: Text Publication details: Mumbai Jaico Publishing House 2008Availability: Items available for reference: Not for loanCall number: RES 621.395 HEL (2). : Request article Add to cart (remove)
	2.	Microlithography: science and technology James R. Sheats by Sheats, James R \| Smith, Brouce W. Material type: Text Publication details: New York Marcel Dekker Inc. 1998Availability: Items available for reference: Not for loanCall number: REF 621.381531 SHE (1). : Request article Add to cart (remove)