| 000 | 00609nam a2200229Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230323212541.0 | ||
| 008 | 180620b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3540200568 | ||
| 040 | _cJUIT, Solan | ||
| 082 | _a621.3663 BAS | ||
| 100 | _aBasting, Dirk | ||
| 245 |
_aExcimer Laser Technology _cby Dirk Basting |
||
| 260 |
_aBerlin _bSpringer Verlag _c2005 |
||
| 300 | _axix, 433p. | ||
| 365 | _a.00 | ||
| 505 | _aContents : Introduction.- Part I Fundam | ||
| 650 | _aExcimer lasers | ||
| 700 | _aMarowsky, Gerd | ||
| 906 | _a2dad8caf7f000001015584ea3187efa3 | ||
| 942 |
_2ddc _cRB |
||
| 999 |
_c11015 _d11015 |
||