| 000 | 00477nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 180620b2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a981253072X | ||
| 082 | _a537.622 MAY | ||
| 100 | _aMay, Gary S. | ||
| 245 |
_aFundamentals of Semiconductor Fabrication _cGary S. May |
||
| 260 |
_aSingapore _bJohn Wiley & Sons _c2004 |
||
| 300 | _axiii,305p. | ||
| 365 | _a.00 | ||
| 650 | _aSemiconductor fabrication | ||
| 700 | _aSze, S.M. | ||
| 906 | _a2dafe6a47f0000010112f0b8d0b7ac3d | ||
| 999 |
_c11620 _d11620 |
||