| 000 | 00739nam a2200241Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230403152932.0 | ||
| 008 | 180620b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0471784060 | ||
| 040 | _cJUIT, Solan | ||
| 082 | _a621.38152 MAY | ||
| 100 | _aMay, Gary S. | ||
| 245 |
_aFundamentals of Semiconductor Manufacturing and Process Control _cby Gary S. May |
||
| 260 |
_aNew Jersy _bWiley-Interscience _c2006 |
||
| 300 | _axix, 463p. | ||
| 365 | _a.00 | ||
| 505 | _aTable of Contents 1 Introduction to sem | ||
| 650 | _aSemiconductors -- design and constructions | ||
| 650 | _aProcess control -- Statistical methods | ||
| 700 | _aSpanos, Costas J. | ||
| 906 | _a2dafe7b27f0000010145fb7b5c0aabed | ||
| 942 |
_2ddc _cRB |
||
| 999 |
_c11622 _d11622 |
||