000 00452nam a2200157Ia 4500
008 180620b2003 xxu||||| |||| 00| 0 eng d
020 _a0750305835
082 _a620.5 WHI
100 _aWhitehouse, David J
245 _aHandbook of Surface and Nanometrology
_cDavid J Whitehouse
260 _aPhiladephia
_bInstitue of Physics
_c2003
300 _axx, 1150p.
365 _a.00
650 _aNanotechnology
906 _a2db1d1e07f00000101a0c4fe7cba2eae
999 _c12239
_d12239