000 | 00452nam a2200157Ia 4500 | ||
---|---|---|---|
008 | 180620b2003 xxu||||| |||| 00| 0 eng d | ||
020 | _a0750305835 | ||
082 | _a620.5 WHI | ||
100 | _aWhitehouse, David J | ||
245 |
_aHandbook of Surface and Nanometrology _cDavid J Whitehouse |
||
260 |
_aPhiladephia _bInstitue of Physics _c2003 |
||
300 | _axx, 1150p. | ||
365 | _a.00 | ||
650 | _aNanotechnology | ||
906 | _a2db1d1e07f00000101a0c4fe7cba2eae | ||
999 |
_c12239 _d12239 |