| 000 | 00670nam a2200241Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230314111009.0 | ||
| 008 | 180620b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0849391377 | ||
| 040 | _cJUIT, Solan | ||
| 082 | _a621.381 GAD | ||
| 100 | _aGad-el-Hak, Mohamed | ||
| 245 |
_aMEMS: introduction and fundamentals _cEdited by Mohamed Gad-el-Hak |
||
| 250 | _a2nd ed. | ||
| 260 |
_aNew York _bCRC Press _c2006 |
||
| 300 | _axii, (Aprox Pages) | ||
| 365 | _a.00 | ||
| 505 | _a1. Introducation Mohamed Gad-ed-Hak 2. | ||
| 650 | _aNanotechnology | ||
| 650 | _aMicroelectronics | ||
| 906 | _a2dbadc2e7f0000010194a989d50d7390 | ||
| 942 |
_2ddc _cRB |
||
| 999 |
_c14496 _d14496 |
||