| 000 | 00612nam a2200229Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230314164635.0 | ||
| 008 | 180620b2007 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780387258744 | ||
| 040 | _cJUIT, Solan | ||
| 082 | _a620.5 JAC | ||
| 100 | _aJackson, Mark J. | ||
| 245 |
_aMicro and Nanomanufacturing _cby Mark J. Jackson |
||
| 260 |
_aNew York _bSpringer _c2007 |
||
| 300 | _ax, 699p. | ||
| 365 | _a.00 | ||
| 505 | _a<p>Table of contents 1. Principles of M | ||
| 650 | _aNanotechnology | ||
| 650 | _aMicrofabrication | ||
| 906 | _a2dbb0b387f000001002f2f911afee788 | ||
| 942 |
_2ddc _cRB |
||
| 999 |
_c14556 _d14556 |
||