| 000 | 00645nam a2200217Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230224103624.0 | ||
| 008 | 180620b2003 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1402076207 | ||
| 040 | _cJUIT, Solan | ||
| 082 | _a621.381 ANA | ||
| 100 | _aAnanthasuresh, G. K. | ||
| 245 |
_aOptimal Synthesis methods for MEMS _cby G K Ananthasuresh |
||
| 260 |
_aLondon _bKluwer Academic Publishers _c2003 |
||
| 300 | _a320p. | ||
| 365 | _a.00 | ||
| 505 | _aTable of Contents; Ch. 1 Introduction 1 | ||
| 650 | _aMicroelectromechanical systems -- Computer simulation. | ||
| 906 | _a2dbf6f3f7f0000010168c1f5bd5ae281 | ||
| 942 |
_2ddc _cRB |
||
| 999 |
_c15693 _d15693 |
||