000 00626nam a2200229Ia 4500
003 OSt
005 20230324183547.0
008 180620b2000 xxu||||| |||| 00| 0 eng d
020 _a0471330019
040 _cJUIT, Solan
082 _a671.735 MAH
100 _aMahan, John E.
245 _aPhysical Vapor Deposition of Thin Films
_cby John E. Mahan
260 _aSingapore
_bJohn Wiley & Sons
_c2000
300 _axiii, 312p.
365 _a.00
505 _aContents : I Introduction to Physical V
650 _aVapor plating
650 _aThin films
906 _a2dc133e47f000001015ab6eade9af688
942 _2ddc
_cTB
999 _c16131
_d16131