| 000 | 00612nam a2200217Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230402161618.0 | ||
| 008 | 180620b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1580539017 | ||
| 040 | _cJUIT, Solan | ||
| 082 | _a621.381 SED | ||
| 100 | _aSedky, Sherif | ||
| 245 |
_aPost-Processing Techniques for Integrated MEMS _cby Sherif Sedky |
||
| 260 |
_aBostan _bArtech House _c2006 |
||
| 300 | _axiv, 207p. | ||
| 365 | _a.00 | ||
| 505 | _aContents: 1. MEMS monolithic integratio | ||
| 650 | _aMicroelectromechanical systems | ||
| 906 | _a2dc1b6687f000001014a777f34c9a769 | ||
| 942 |
_2ddc _cRB |
||
| 999 |
_c16287 _d16287 |
||