| 000 | 00747nam a2200253Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230301120618.0 | ||
| 008 | 180620b2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0195136055 | ||
| 040 | _cJUIT, Solan | ||
| 082 | _a621.38152 CAM | ||
| 100 | _aCampbell, Stephen A | ||
| 245 |
_aScience and Engineering of Microelectronic Fabrication _cby Stephen A. Campbell |
||
| 250 | _a2nd ed. | ||
| 260 |
_aNew York _bOxford University Press _c2004 |
||
| 300 | _axiv,603 | ||
| 365 | _a.00 | ||
| 505 | _aContents : 1. An Introduction to Microe | ||
| 650 | _aSemiconductors--Design and construction | ||
| 650 | _ascience engineering | ||
| 650 | _aMicroelectronics | ||
| 906 | _a2dc679167f0000010081cf2c9beeb0dc | ||
| 942 |
_2ddc _cTB |
||
| 999 |
_c17528 _d17528 |
||