000			00631nam a2200217Ia 4500
008			180620b2010 xxu||||| |||| 00| 0 eng d
020			_a9781441900395
082			_a621.381046 WON
100			_aWong, C.P.
245			_aNano-bio-electronic, Photonic and Mems Packaging _cEdited by C.P. Wong
250			_a1st ed.
260			_aNew York _bSpringer Verlag, Netherlands _c2010
300			_axi, 761p.
650			_aMEMS
650			_aNanotechnology
650			_aElectronic packaging
650			_aBioelectronics.
650			_aNanophotonics
650			_aNanostructured materials
906			_a0e271c9aac1049190020685658c1c797
999			_c1932 _d1932