| 000 | 00610nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 180620b1993 xxu||||| |||| 00| 0 eng d | ||
| 022 | _a0960-1317 | ||
| 082 | _aEJ0004 | ||
| 100 | _aAmerican Institute of Physics | ||
| 245 | _aJournal of micromechanics and microengineering : structures, devices, and systems. | ||
| 260 |
_aBristol, England _bIOP Publishing Ltd _c1993 |
||
| 300 | _aVolume 3, Issue 3, September 1993 | ||
| 650 | _aSolid state physics - Periodicals | ||
| 650 | _aMicromechanics - Periodicals | ||
| 856 | _uhttp://iopscience.iop.org/0960-1317/3/3 | ||
| 906 | _aa4d800e3ac10491900b08241ccdbc02b | ||
| 999 |
_c45776 _d45776 |
||