| 000 | 00461nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 180620b2016 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9788126532605 | ||
| 082 | _a537.622 MAY | ||
| 100 | _aMay, Gary S. | ||
| 245 |
_aFundamentals of Semiconductor Fabrication _cGary S. May |
||
| 260 |
_aNew Delhi _bJohn Wiley & Sons _c2016 |
||
| 300 | _axiii, 305p. | ||
| 650 | _aSemiconductor fabrication | ||
| 700 | _aSze, S.M. | ||
| 906 | _ab0ec640da9fe5f7836a36cb4f9809b6b | ||
| 999 |
_c47779 _d47779 |
||