000 00646nam a2200217Ia 4500
003 OSt
005 20230403135612.0
008 180620b2009 xxu||||| |||| 00| 0 eng d
020 _a9780387777467
040 _cJUIT, Solan
082 _a621.381 LAN
100 _aLang, Jeffrey H.
245 _aMulti-Wafer Rotating Mems Machines: turbines, generators, and engines
_cEdited by Jeffrey H. Lang
260 _aNew York
_bSpringer
_c2009
300 _axv, 456p.
505 _a<p>Contents:</p> <p>1. Introduction to
650 _aCombustion
650 _aMaterials Structures
906 _aecc677b5ac100b20009d6608bfb7781d
942 _2ddc
_cRB
999 _c55868
_d55868