000 00542nam a2200181Ia 4500
008 180620b2006 xxu||||| |||| 00| 0 eng d
020 _a352731055X
082 _a621.366 MIS
100 _aMisawa, Hiroaki
245 _a3D Laser Microfabrication: principles and applications
_cEdited by Hiroaki Misawa
260 _aGermany
_bWiley
_c2006
300 _axv, 388p.
365 _a.00
650 _aMicrofabrication
650 _aLasers -- Industrial applications
700 _aJuodkazis, Saulius
906 _a2d9d6be97f000001016c0fba83b6d8e9
999 _c58658
_d58658