000 00437nam a2200157Ia 4500
008 180620b2005 xxu||||| |||| 00| 0 eng d
020 _a3540289224
082 _a620.5 CUI
100 _aCui, Zheng
245 _aMicro-Nanafabrication: technologies and application
_cZheng Cui
260 _aLondon
_bSpringer Verlag
_c2005
300 _ax, 304p.
365 _a.00
650 _aNanotechnology
906 _a2dbb54247f00000101d657c6b4c35c8b
999 _c60269
_d60269