| 000 | 00562nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 180620b2008 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780470174470 | ||
| 082 | _a621.381 IRE | ||
| 100 | _aIrene, Eugene A | ||
| 245 |
_aSurfaces, Interfaces, and Thin Films for Microelectronics _cEugene A. Irene. |
||
| 260 |
_aHoboken, N.J. _bWiley _c2008 |
||
| 300 | _axiii, 515p. | ||
| 650 | _aMicroelectronics - Materials | ||
| 650 | _aThin films | ||
| 650 | _aInterfaces (Physical sciences) | ||
| 650 | _aSurface chemistry | ||
| 906 | _a9e731578ac10491901bb9bf3bd68d9e0 | ||
| 999 |
_c63120 _d63120 |
||