000 | 00504nam a2200145Ia 4500 | ||
---|---|---|---|
008 | 180620b2002 xxu||||| |||| 00| 0 eng d | ||
020 | _a9780125129091 | ||
082 | _a621.38152 NAL | ||
100 | _aNalwa, Hari Singh | ||
245 |
_aHandbook of Thin Film Materials: deposition and processing of thin films; vol. 1 _cEdited by Hari Singh Nalwa |
||
260 |
_aSan Diego _bAcademic Press _c2002 |
||
300 | _axxvi, 706p. | ||
650 | _aThin films - Handbooks, manuals, etc | ||
906 | _a0f4db5e5ac1049190173f2b6224e90fd | ||
999 |
_c70126 _d70126 |