000 00504nam a2200145Ia 4500
008 180620b2002 xxu||||| |||| 00| 0 eng d
020 _a9780125129091
082 _a621.38152 NAL
100 _aNalwa, Hari Singh
245 _aHandbook of Thin Film Materials: deposition and processing of thin films; vol. 1
_cEdited by Hari Singh Nalwa
260 _aSan Diego
_bAcademic Press
_c2002
300 _axxvi, 706p.
650 _aThin films - Handbooks, manuals, etc
906 _a0f4db5e5ac1049190173f2b6224e90fd
999 _c70126
_d70126