000 00556nam a2200169Ia 4500
008 180620b2011 xxu||||| |||| 00| 0 eng d
020 _a9780123743930
082 _a620.5 AND
100 _aAndrews, David L.
245 _aComprehensive Nanoscience and Technology: Nanofabrication and devices; Vol. 4
_cDavid L. Andrews
260 _aAmsterdam
_bElsevier Academic Press
_c2011
300 _axxi, 630p.
650 _aNanoscience and technology
700 _aWiederrecht, Gary P
700 _aScholes, Gregory D
906 _a9822d24bac104919019171545a665b9d
999 _c71760
_d71760