| 000 | 00506nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 180620b2001 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0824703804 | ||
| 082 | _a537.622 DON | ||
| 100 | _aDonovan, Robert P. | ||
| 245 |
_aContamination- Free Manufacturing for Semiconductors and Other Precision Products _cRobert P. Donovan |
||
| 260 |
_aNew York _bMarcel Dekker Inc. _c2001 |
||
| 300 | _ax, 448p. | ||
| 365 | _a.00 | ||
| 650 | _aSemiconductors -- manufacturing | ||
| 906 | _a2da6a3a27f00000100e4f301160b829d | ||
| 999 |
_c9179 _d9179 |
||