Post-Processing Techniques for Integrated MEMS by Sherif Sedky

By: Sedky, SherifMaterial type: TextTextPublication details: Bostan Artech House 2006Description: xiv, 207pISBN: 1580539017Subject(s): Microelectromechanical systemsDDC classification: 621.381 SED
Contents:
Contents: 1. MEMS monolithic integratio
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Item type Current library Collection Call number Vol info Status Date due Barcode Item holds
REFERENCE BOOK REFERENCE BOOK LRC_JUIT
Electronics & Communication Engineering
REFERENCE SECTION REF 621.381 SED (Browse shelf (Opens below)) Copy 1 Not for loan 019318
Total holds: 0

Contents:
1. MEMS monolithic integratio

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