Post-Processing Techniques for Integrated MEMS by Sherif Sedky
Material type: TextPublication details: Bostan Artech House 2006Description: xiv, 207pISBN: 1580539017Subject(s): Microelectromechanical systemsDDC classification: 621.381 SED
Contents:
Contents:
1. MEMS monolithic integratio
Item type | Current library | Collection | Call number | Vol info | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|---|
REFERENCE BOOK | LRC_JUIT Electronics & Communication Engineering | REFERENCE SECTION | REF 621.381 SED (Browse shelf (Opens below)) | Copy 1 | Not for loan | 019318 |
Total holds: 0
Contents:
1. MEMS monolithic integratio
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