Microlithography: science and technology James R. Sheats

By: Sheats, James RContributor(s): Smith, Brouce WMaterial type: TextTextPublication details: New York Marcel Dekker Inc. 1998Description: xii, 780pISBN: 0824799534Subject(s): Microlithography | Metal oxide semiconductorDDC classification: 621.381531 SHE
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Item type Current library Collection Call number Vol info Status Date due Barcode Item holds
REFERENCE BOOK REFERENCE BOOK LRC_JUIT
Electronics & Communication Engineering
REFERENCE SECTION REF 621.381531 SHE (Browse shelf (Opens below)) Copy 1 Not for loan 018670
Total holds: 0

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